18
Sep
Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers
Nature, Published online: 18 September 2024; doi:10.1038/s41586-024-07941-9
Superconducting transmon qubits have been fabricated in a 300 mm complementary metal–oxide–semiconductor (CMOS) pilot line using industrial fabrication methods, achieving relaxation and coherence times exceeding 100 μs.
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