18
Sep

Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers

Nature, Published online: 18 September 2024; doi:10.1038/s41586-024-07941-9

Superconducting transmon qubits have been fabricated in a 300 mm complementary metal–oxide–semiconductor (CMOS) pilot line using industrial fabrication methods, achieving relaxation and coherence times exceeding 100 μs.